Metal complexes containing cyclopentadienyl ligands

ABSTRACT

Metal complexes including cyclopentadienyl ligands and methods of using such metal complexes to prepare metal-containing films are provided.

CROSS-REFERENCE TO RELATED APPLICATIONS

This patent application is a U.S. national stage application under 35 U.S.C. § 371 of International Patent Application No. PCT/EP2017/001283 filed on 3 Nov. 2017, which claims the benefit of U.S. Provisional Patent Application No. 62/418,981 filed on 8 Nov. 2016. The entire disclosures of each of the above recited applications are incorporated herein by reference.

FIELD OF THE INVENTION

The present technology relates generally to metal complexes including cyclopentadienyl ligands, methods of preparing such complexes and methods of preparing metal-containing thin films using such complexes.

BACKGROUND

Various precursors are used to form thin films and a variety of deposition techniques have been employed. Such techniques include reactive sputtering, ion-assisted deposition, sol-gel deposition, chemical vapor deposition (CVD) (also known as metalorganic CVD or MOCVD), and atomic layer deposition (ALD) (also known as atomic layer epitaxy). CVD and ALD processes are increasingly used as they have the advantages of enhanced compositional control, high film uniformity, and effective control of doping. Moreover, CVD and ALD processes provide excellent conformal step coverage on highly non-planar geometries associated with modern microelectronic devices.

CVD is a chemical process whereby precursors are used to form a thin film on a substrate surface. In a typical CVD process, the precursors are passed over the surface of a substrate (e.g., a wafer) in a low pressure or ambient pressure reaction chamber. The precursors react and/or decompose on the substrate surface creating a thin film of deposited material. Volatile by-products are removed by gas flow through the reaction chamber. The deposited film thickness can be difficult to control because it depends on coordination of many parameters such as temperature, pressure, gas flow volumes and uniformity, chemical depletion effects, and time.

ALD is also a method for the deposition of thin films. It is a self-limiting, sequential, unique film growth technique based on surface reactions that can provide precise thickness control and deposit conformal thin films of materials provided by precursors onto surfaces substrates of varying compositions. In ALD, the precursors are separated during the reaction. The first precursor is passed over the substrate surface producing a monolayer on the substrate surface. Any excess unreacted precursor is pumped out of the reaction chamber. A second precursor is then passed over the substrate surface and reacts with the first precursor, forming a second monolayer of film over the first-formed monolayer of film on the substrate surface. This cycle is repeated to create a film of desired thickness.

Thin films, and in particular thin metal-containing films, have a variety of important applications, such as in nanotechnology and the fabrication of semiconductor devices. Examples of such applications include high-refractive index optical coatings, corrosion-protection coatings, photocatalytic self-cleaning glass coatings, biocompatible coatings, dielectric capacitor layers and gate dielectric insulating films in field-effect transistors (FETs), capacitor electrodes, gate electrodes, adhesive diffusion barriers, and integrated circuits. Dielectric thin films are also used in microelectronics applications, such as the high-κ dielectric oxide for dynamic random access memory (DRAM) applications and the ferroelectric perovskites used in infrared detectors and non-volatile ferroelectric random access memories (NV-FeRAMs). The continual decrease in the size of microelectronic components has increased the need for improved thin film technologies.

Technologies relating to the preparation of scandium-containing and yttrium-containing thin films (e.g., scandium oxide, yttrium oxide, etc.) are of particular interest. For example, scandium-containing films have found numerous practical applications in areas such as catalysts, batteries, memory devices, displays, sensors, and nano- and microelectronics and semiconductor devices. In the case of electronic applications, commercial viable deposition methods using scandium-containing and yttrium-containing precursors having suitable properties including volatility, low melting point, reactivity and stability are needed. However, there are a limited number of available scandium-containing and yttrium-containing compounds which possess such suitable properties. Accordingly, there exists significant interest in the development of scandium and yttrium complexes with performance characteristics which make them suitable for use as precursor materials in vapor deposition processes to prepare scandium-containing and yttrium-containing films. For example, scandium-containing and yttrium-containing precursors with improved performance characteristics (e.g., thermal stabilities, vapor pressures, and deposition rates) are needed, as are methods of depositing thin films from such precursors.

SUMMARY

According to one aspect, a metal complex of Formula I is provided: [(R¹)_(n)Cp]₂M¹L¹ (I), wherein M¹ is a Group 3 metal or a lanthanide (e.g., scandium, yttrium and lanthanum); each R¹ is independently hydrogen, C₁-C₅-alkyl or silyl; n is 1, 2, 3, 4, or 5; Cp is cyclopentadienyl ring; and L¹ is selected from the group consisting of: NR²R³; N(SiR⁴R⁵R⁶)₂; 3,5-R⁷R⁸—C₃HN₂; 1-(R³²)C₃H₄; 1-R³³-3-R³⁴—C₃H₃; and R³⁵, R³⁶—C₃HO₂; wherein R², R³, R⁴, R⁵, R⁶, R⁷, and R⁸ are each independently hydrogen or C₁-C₅-alkyl; and R³², R³³, R³⁴, R³⁵, and R³⁶ are each independently alkyl or silyl; wherein when M¹ is yttrium and L¹ is 3,5-R⁷R⁸—C₃HN₂, R¹ is C₁-C₅-alkyl or silyl; and wherein when M¹ is yttrium and L¹ is N(SiR⁴R⁵R⁶)₂, n is 1, 2, 3, or 4.

In other aspects, a metal complex of Formula II is provided: [((R⁹)_(n)Cp)₂M²L²]₂ (II), wherein M² is a Group 3 metal or a lanthanide (e.g., scandium, yttrium and lanthanum); each R⁹ is independently hydrogen or C₁-C₅-alkyl; n is 1, 2, 3, 4 or 5; Cp is cyclopentadienyl ring; and L² is selected from the group consisting of: Cl, F, Br, I, and 3,5-R¹⁰R¹¹—C₃HN₂; wherein R¹⁰ and R¹¹ are each independently hydrogen or C₁-C₅-alkyl; wherein when M² is scandium and L² is Cl, R⁹ is C₁-C₅-alkyl.

In other aspects, methods of forming metal-containing films by vapor deposition, such as CVD and ALD, are provided herein. The method comprises vaporizing at least one metal complex corresponding in structure to Formula I: (R¹Cp)₂M¹L¹ (I), wherein M¹ is a Group 3 metal or a lanthanide (e.g., scandium, yttrium and lanthanum); each R¹ is independently hydrogen, C₁-C₅-alkyl or silyl; Cp is cyclopentadienyl ring; and L¹ is selected from the group consisting of: NR²R³; N(SiR—⁴R⁵R⁶)₂; 3,5-R⁷R⁸—C₃HN₂; 1-(R³²)C₃H₄; 1-R³³-3-R³⁴—C₃H₃; and R³⁵, R³⁶—C₃HO₂; wherein R², R³, R⁴, R⁵, R⁶, R⁷, and R⁸ are each independently hydrogen or C₁-C₅-alkyl; and R³², R³³, R³⁴, R³⁵, and R³⁶ are each independently alkyl or silyl.

Other embodiments, including particular aspects of the embodiments summarized above, will be evident from the detailed description that follows.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates XPS (X-ray Photoelectron Spectroscopy) analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 2 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 3 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 4 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate.

FIG. 5 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 6 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 7 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 8 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 9 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 10 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 11 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 12 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 13 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 14 illustrates XPS analysis of Sc₂O₃ films using Sc(MeCp)₂(3,5-dimethyl-pyrazolate).

FIG. 15 illustrates dependence of ALD Y₂O₃ growth rate per cycle on the deposition temperature when depositing [Y(MeCp)₂(3,5-MePn—C₃HN₂)]₂.

FIG. 16 illustrates dependence of ALD Y₂O₃ growth rate per cycle on H₂O purge time when depositing [Y(MeCp)₂(3,5-MePn—C₃HN₂)]₂ at 125° C., 150° C. and 200° C.

FIG. 17 illustrates ALD Y₂O₃ growth rate per cycle at 3 different positions in a cross-flow reactor along the precursor/carrier gas flow direction, the precursor inlet, the reactor center, and precursor outlet.

DETAILED DESCRIPTION

Before describing several exemplary embodiments of the present technology, it is to be understood that the technology is not limited to the details of construction or process steps set forth in the following description. The present technology is capable of other embodiments and of being practiced or being carried out in various ways. It is also to be understood that the metal complexes and other chemical compounds may be illustrated herein using structural formulas which have a particular stereochemistry. These illustrations are intended as examples only and are not to be construed as limiting the disclosed structure to any particular stereochemistry. Rather, the illustrated structures are intended to encompass all such metal complexes and chemical compounds having the indicated chemical formula.

In various aspects, metal complexes, methods of making such metal complexes, and methods of using such metal complexes to form thin metal-containing films via vapor deposition processes, are provided.

As used herein, the terms “metal complex” (or more simply, “complex”) and “precursor” are used interchangeably and refer to metal-containing molecule or compound which can be used to prepare a metal-containing film by a vapor deposition process such as, for example, ALD or CVD. The metal complex may be deposited on, adsorbed to, decomposed on, delivered to, and/or passed over a substrate or surface thereof, as to form a metal-containing film. In one or more embodiments, the metal complexes disclosed herein are nickel complexes.

As used herein, the term “metal-containing film” includes not only an elemental metal film as more fully defined below, but also a film which includes a metal along with one or more elements, for example a metal oxide film, metal nitride film, metal silicide film, and the like. As used herein, the terms “elemental metal film” and “pure metal film” are used interchangeably and refer to a film which consists of, or consists essentially of, pure metal. For example, the elemental metal film may include 100% pure metal or the elemental metal film may include at least about 90%, at least about 95%, at least about 96%, at least about 97%, at least about 98%, at least about 99%, at least about 99.9%, or at least about 99.99% pure metal along with one or more impurities. Unless context dictates otherwise, the term “metal film” shall be interpreted to mean an elemental metal film. In some embodiments, the metal-containing film is an elemental scandium or yttrium film. In other embodiments, the metal-containing film is scandium oxide, yttrium oxide, scandium nitride, yttrium nitride, scandium silicide or yttrium silicide film. Such scandium-containing and yttrium-containing films may be prepared from various scandium and yttrium complexes described herein.

As used herein, the term “vapor deposition process” is used to refer to any type of vapor deposition technique, including but not limited to, CVD and ALD. In various embodiments, CVD may take the form of conventional (i.e., continuous flow) CVD, liquid injection CVD, or photo-assisted CVD. CVD may also take the form of a pulsed technique, i.e., pulsed CVD. In other embodiments, ALD may take the form of conventional (i.e., pulsed injection) ALD, liquid injection ALD, photo-assisted ALD, plasma-assisted ALD, or plasma-enhanced ALD. The term “vapor deposition process” further includes various vapor deposition techniques described in Chemical Vapour Deposition: Precursors, Processes, and Applications; Jones, A. C.; Hitchman, M. L., Eds. The Royal Society of Chemistry: Cambridge, 2009; Chapter 1, pp 1-36.

The term “alkyl” (alone or in combination with another term(s)) refers to a saturated hydrocarbon chain of 1 to about 12 carbon atoms in length, such as, but not limited to, methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, and so forth. The alkyl group may be straight-chain or branched-chain. “Alkyl” is intended to embrace all structural isomeric forms of an alkyl group. For example, as used herein, propyl encompasses both n-propyl and isopropyl; butyl encompasses n-butyl, sec-butyl, isobutyl and tert-butyl; pentyl encompasses n-pentyl, tert-pentyl, neopentyl, isopentyl, sec-pentyl and 3-pentyl. Further, as used herein, “Me” refers to methyl, “Et” refers to ethyl, “Pr” refers to propyl, “i-Pr” refers to isopropyl, “Bu” refers to butyl, “t-Bu” refers to tert-butyl, “iBu” refers to isobutyl, “Pn” refers to and “NPn” refers to neopentyl. In some embodiments, alkyl groups are C₁-C₅- or C₁-C₄-alkyl groups.

The term “allyl” refers to an allyl (C₃H₅) ligand which is bound to a metal center. As used herein, the allyl ligand has a resonating double bond and all three carbon atoms of the allyl ligand are bound to the metal center in η³-coordination by π bonding. Therefore, the complexes of the invention are π complexes. Both of these features are represented by the dashed bonds. When the allyl portion is substituted by one X group, the X¹ group replaces an allylic hydrogen to become [X¹C₃H₄]; when substituted with two X groups X¹ and X², it becomes [X¹X²C₃H₃] where X¹ and X² are the same or different, and so forth.

The term “silyl” refers to a —SiZ¹Z²Z³ radical, where each of Z¹, Z², and Z³ is independently selected from the group consisting of hydrogen and optionally substituted alkyl, alkenyl, alkynyl, aryl, alkoxy, aryloxy, amino, and combinations thereof.

The term “trialkylsilyl” refers to a —SiZ⁴Z⁵Z⁶ radical, wherein Z⁵, Z⁶, and Z⁷ are alkyl, and wherein Z⁵, Z⁶, and Z⁷ can be the same or different alkyls. Non-limiting examples of a trialkylsilyl include trimethylsilyl (TMS), triethylsilyl (TES), triisopropylsilyl (TIPS) and tert-butyldimethylsilyl (TBDMS).

Deposition of some metals, including scandium and yttrium, can be difficult to achieve due to thermal stability issues, being either unstable or too stable for deposition. The organometallic complexes disclosed in the embodiments of the invention allow for control of physical properties as well as provide for increased stability and simple high yield synthesis. In this regard, the metal complexes provided herein are excellent candidates for preparation of thin metal-containing films in various vapor deposition processes.

Therefore, according to one aspect, a metal complex of Formula I is provided: [(R¹)_(n)Cp]₂M¹L¹ (I), wherein M¹ is a Group 3 metal or a lanthanide; each R¹ is independently hydrogen, C₁-C₅-alkyl or silyl; n is 1, 2, 3, 4, or 5; Cp is cyclopentadienyl ring; and L¹ is selected from the group consisting of: NR²R³; N(SiR⁴R⁵R⁶)₂; 3,5-R⁷R⁸—C₃HN₂; 1-(R³²)C₃H₄; 1-R³³-3-R³⁴—C₃H₃; R³⁵, R³⁶—C₃HO₂; R¹²N═C—C—NR¹³; R¹⁴R¹⁵N—CH₂—CH₂—NR¹⁶—CH₂—CH₂—NR¹⁷R¹⁸; and R¹⁹O—CH₂—CH₂—NR²⁰—CH₂—CH₂—OR²¹; wherein R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ are each independently hydrogen or C₁-C₅-alkyl and R³², R³³, R³⁴, R³⁵, and R³⁶ are each independently alkyl or silyl.

In some embodiments, M¹ may be selected from the group consisting of scandium, yttrium and lanthanum. In other embodiments, M¹ may be selected from the group consisting of scandium and yttrium. In particular, M¹ may be scandium.

In other embodiments, when M¹ is yttrium and L¹ is 3,5-R⁷R⁸—C₃HN₂, R¹ is C₁-C₅-alkyl or silyl and/or wherein when M¹ is yttrium and L¹ is N(SiR⁴R⁵R⁶)₂, n is 1, 2, 3, or 4.

In some embodiments, L¹ is selected from the group consisting of: NR²R³; N(SiR⁴R⁵R⁶)₂; 3,5-R⁷R⁸—C₃HN₂; 1-(R³²)C₃H₄; 1-R³³-3-R³⁴—C₃H₃, and R³⁵, R³⁶—C₃HO₂.

In some embodiments, L¹ is selected from the group consisting of: NR²R³; N(SiR⁴R⁵R⁶)₂; 3,5-R⁷R⁸—C₃HN₂; 1-(SiMe₃)C₃H₄(trimethyl silylallyl); 1,3-bis-(SiMe₃)₂C₃H₃(bis-trimethyl silylallyl), 6-methyl-2,4-heptanedionate.

R¹, at each occurrence, can be the same or different. For example, if n is 2, 3, 4, or 5, each R¹ may all be hydrogen or all be an alkyl (e.g., C₁-C₅-alkyl) or all be silyl. Alternatively, if n is 2, 3, 4, or 5, each R¹ may be different. For example if n is 2, a first R¹ may be hydrogen and a second R¹ may be an alkyl (e.g., C₁-C₅-alkyl) or silyl.

R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ at each occurrence, can be the same or different. For example, R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ may all be hydrogen or all be an alkyl (e.g., C₁-C₅-alkyl).

In one embodiment, up to and including sixteen of R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ may each be hydrogen. For example, at least one of, at least two of, at least three of, at least four of or at least five of, at least six of, at least seven of, at least eight of, at least nine of, at least ten of, at least eleven of, at least twelve of, at least thirteen of, at least fourteen of, at least fifteen of, or at least sixteen of R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹, R¹⁸, R¹⁹, R²⁰, and R²¹ may be hydrogen.

In another embodiment, up to and including sixteen of R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ each independently may be an alkyl. For example, at least one of, at least two of, at least three of, at least four of or at least five of, at least six of, at least seven of, at least eight of, at least nine of, at least ten of, at least eleven of, at least twelve of, at least thirteen of, at least fourteen of, at least fifteen of, or at least sixteen of R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ may be an alkyl.

R³², R³³, and R³⁴ at each occurrence, can be the same or different. For example, R³², R³³, and R³⁴ may all be an alkyl (e.g., C₁-C₅-alkyl) or may all be silyl (e.g., SiMe₃).

R³⁵ and R³⁶ at each occurrence, can be the same or different. For example, R³⁵ and R³⁶ may all be the same or different alkyl (e.g., C₁-C₅-alkyl), R³⁵ and R³⁶ may all be the same or different silyl (e.g., SiMe₃) or R³⁵ and R³⁶ may be an alkyl (e.g., C₁-C₅-alkyl) and a silyl (e.g., SiMe₃).

In one embodiment, up to and including two of R³², R³³, R³⁴, R³⁵, and R³⁶ each independently may be alkyl. For example, at least one of or at least two of R³², R³³, R³⁴, R³⁵, and R³⁶ may be an alkyl.

In another embodiment, up to and including two of R³², R³³, R³⁴, R³⁵, and R³⁶ each independently may be silyl. For example, at least one of or at least two of R³², R³³, R³⁴, R³⁵, and R³⁶ may be an silyl.

The alkyl groups discussed herein can be C₁-C₅-alkyl, C₁-C₇-alkyl, C₁-C₆-alkyl, C₁-C₅-alkyl, C₁-C₄-alkyl, C₁-C₃-alkyl, C₁-C₂-alkyl or C₁-alkyl. In a further embodiment, the alkyl is C₁-C₅-alkyl, C₁-C₄-alkyl, C₁-C₃-alkyl, C₁-C₂-alkyl or C₁-alkyl. The alkyl group may be straight-chained or branch. In particular, the alkyl is straight-chained. In a further embodiment the alkyl is selected from the group consisting of methyl, ethyl, propyl, isopropyl, butyl, isobutyl, sec-butyl, tert-butyl, pentyl, and neopentyl.

The silyl group discussed herein can be, but is not limited to Si(alkyl)₃, Si(alkyl)₂H, and Si(alkyl)H₂, wherein the alkyl is as described above. Examples of the silyl include, but are not limited to SiH₃, SiMeH₂, SiMe₂H, SiMe₃, SiEtH₂, SiEt₂H, SiEt₃, SiPrH₂, SiPr₂H, SiPr₃, SiBuH₂, SiBu₂H, SiBu₃, where “Pr” includes i-Pr and “Bu” includes t-Bu.

In some embodiments, each R¹ independently may be hydrogen, C₁-C₄-alkyl or silyl. In another embodiment, each R¹ independently may be hydrogen, methyl, ethyl, propyl or silyl. In another embodiment, each R¹ independently may be hydrogen, methyl, or ethyl. In particular, each R¹ may be methyl.

In some embodiments, R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ each independently may be hydrogen or C₁-C₄-alkyl. In other embodiments, R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ each independently may be hydrogen, methyl, ethyl or propyl. In other embodiments, R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ each independently may hydrogen, methyl, or ethyl. In particular, R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ each independently may be hydrogen or methyl.

In some embodiments, each R¹ independently may be hydrogen, C₁-C₄-alkyl or silyl; and R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R⁹, R¹⁰, R¹¹, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, and R¹⁸ each independently may be hydrogen or C₁-C₄-alkyl.

In other embodiments, each R¹ independently may be hydrogen, methyl, ethyl, propyl or silyl; and R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ each independently may be hydrogen, methyl, ethyl or propyl.

In some embodiments, each R¹ independently may be hydrogen, methyl, or ethyl; and R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ each independently may be hydrogen, methyl, or ethyl. In another embodiment, each R¹ may be methyl and R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R¹⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ each independently may be hydrogen or methyl.

In some embodiments, R³², R³³, R³⁴, R³⁵, and R³⁶ each independently may be C₁-C₅-alkyl or silyl. In other embodiments, R³², R³³, R³⁴, R³⁵, and R³⁶ each independently may be C₁-C₄-alkyl or silyl. In other embodiments, R³², R³³, R³⁴, R³⁵, and R³⁶ each independently may be methyl, ethyl, propyl or silyl. In other embodiments, R³², R³³, R³⁴, R³⁵, and R³⁶ each independently may be methyl, ethyl or silyl. In other embodiments, R³², R³³, R³⁴, R³⁵, and R³⁶ each independently may silyl, such as but not limited to, SiH₃, SiMeH₂, SiMe₂H, SiMe₃, SiEtH₂, SiEt₂H, SiEt₃, SiPrH₂, SiPr₂H, SiPr₃, SiBuH₂, SiBu₂H, SiBu₃. In particular, R³², R³³, R³⁴, R³⁵, and R³⁶ each independently may be SiMe₃. In particular, R³², R³³, and R³⁴, each independently may be SiMe₃. In other embodiments, R³⁵ and R³⁶ may each independently be C₁-C₄-alkyl, particularly methyl and/or butyl.

In some embodiments, L¹ is selected from the group consisting of: NR²R³; N(SiR⁴R⁵R⁶)₂; 1-(R³²)C₃H₄; and 1-R³³-3-R³⁴—C₃H₃.

In another embodiment, L¹ may be selected from the group consisting of: NR²R³; N(SiR⁴R⁵R⁶)₂; 1-(SiMe₃)C₃H₄; 1,3-bis-(SiMe₃)₂C₃H₃; and R³⁵, R³⁶—C₃HO₂.

In another embodiment, each R¹ independently may be hydrogen, C₁-C₄-alkyl or silyl; and L¹ is NR²R³, wherein R² and R³ each independently may be hydrogen or C₁-C₄-alkyl. In another embodiment, each R¹ independently may be hydrogen, methyl, ethyl, propyl or silyl; and R² and R³ each independently may be hydrogen, methyl, ethyl or propyl. In another embodiment, each R¹ independently may be hydrogen, methyl, or ethyl; and R² and R³ each independently may be hydrogen, methyl, or ethyl. In particular, each R¹ may be methyl; and R² and R³ each independently may be hydrogen, methyl, or ethyl.

In another embodiment, each R¹ independently may be hydrogen, C₁-C₄-alkyl or silyl; and L¹ is N(SiR⁴R⁵R⁶)₂, wherein R⁴, R⁵, and R⁶ each independently may be hydrogen or C₁-C₄-alkyl. In another embodiment, each R¹ independently may be hydrogen, methyl, ethyl, propyl or silyl; and R⁴, R⁵, and R⁶ each independently may be hydrogen, methyl, ethyl or propyl. In another embodiment, each R¹ independently may be hydrogen, methyl, or ethyl; and R⁴, R⁵, and R⁶ each independently may be hydrogen, methyl, or ethyl. In particular, each R¹ may be methyl; and R⁴, R⁵, and R⁶ each independently may be hydrogen, methyl, or ethyl.

In some embodiments, each R¹ independently may be hydrogen, C₁-C₄-alkyl or silyl; and L¹ may be 3,5-R⁷R⁸—C₃HN₂, wherein R⁷ and R⁸ each independently may be hydrogen or C₁-C₅-alkyl. In other embodiments, each R¹ independently may be hydrogen, methyl, ethyl, propyl or silyl. In other embodiments, each R¹ independently may be hydrogen, methyl, or ethyl. In particular, each R¹ may be methyl. In other embodiments, R⁷ and R⁸ each independently may be hydrogen or C₁-C₄-alkyl or hydrogen. In other embodiments, R⁷ and R⁸ each independently may be methyl, ethyl, propyl or hydrogen. In particular, R⁷ and R⁸ each independently may be methyl or ethyl.

In some embodiments, each R¹ independently may be hydrogen, C₁-C₄-alkyl or silyl; and L¹ may be 1-(R³²)C₃H₄, wherein R³² may be C₁-C₅-alkyl or silyl. In another embodiment, R³² may be C₁-C₄-alkyl or silyl. In other embodiments, each R¹ independently may be hydrogen, methyl, ethyl or silyl and R³² may be silyl. In another embodiment, each R¹ independently may be hydrogen, methyl or ethyl and R³² may be a silyl, such as but not limited to, SiH₃, SiMeH₂, SiMe₂H, SiMe₃, SiEtH₂, SiEt₂H, SiEt₃, SiPrH₂, SiPr₂H, SiPr₃, SiBuH₂, SiBu₂H, SiBu₃. In particular, each R¹ independently may be methyl or ethyl and R³² may be SiMe₃.

In other embodiments, each R¹ independently may be hydrogen, C₁-C₄-alkyl or silyl; and L¹ may be 1-R³³-3-R³⁴—C₃H₃, wherein R³³ and R³⁴ may be C₁-C₅-alkyl or silyl. In another embodiment, each R¹ independently may be hydrogen, methyl, ethyl or silyl and R³³ and R³⁴ may each independently be C₁-C₄-alkyl or silyl and R³² may be silyl. In another embodiment, each R¹ independently may be hydrogen, methyl or ethyl and R³³ and R³⁴ may each independently be a silyl, such as but not limited to, SiH₃, SiMeH₂, SiMe₂H, SiMe₃, SiEtH₂, SiEt₂H, SiEt₃, SiPrH₂, SiPr₂H, SiPr₃, SiBuH₂, SiBu₂H, SiBu₃. In particular, each R¹ independently may be methyl or ethyl and R³³ and R³⁴ may be SiMe₃.

In other embodiments, each R¹ independently may be hydrogen, C₁-C₄-alkyl or silyl; and L¹ may be R³⁵, R³⁶—C₃HO₂, wherein R³⁵ and R³⁶ may be C₁-C₅-alkyl or silyl. In another embodiment, each R¹ independently may be hydrogen, methyl, ethyl or silyl and R³⁵ and R³⁶ may each independently be C₁-C₄-alkyl or silyl. In another embodiment, each R¹ independently may be hydrogen, methyl or ethyl and R³⁵ and R³⁶ may each independently be a silyl, such as but not limited to, SiH₃, SiMeH₂, SiMe₂H, SiMe₃, SiEtH₂, SiEt₂H, SiEt₃, SiPrH₂, SiPr₂H, SiPr₃, SiBuH₂, SiBu₂H, SiBu₃. In another embodiment, each R¹ independently may be hydrogen, methyl or ethyl and R³⁵ and R³⁶ may each independently be C₁-C₄-alkyl, particularly methyl and/or butyl. In particular, each R¹ independently may be methyl or ethyl and R³⁵ and R³⁶ may independently each be methyl or butyl. In particular, each R¹ independently may be methyl or ethyl and R³⁵ and R³⁶ may be SiMe₃.

Examples of metal complexes corresponding in structure to Formula I are provided in Table 1.

TABLE 1 Complexes of Formula I Sc(MeCp)₂[1-(SiMe₃)C₃H₄] (1) Sc(MeCp)₂[1,3-bis-(SiMe₃)₂C₃H₃] (2) Sc(MeCp)₂[N(SiMe₃)₂] (3) Sc(MeCp)₂(3,5-Me₂-C₃HN₂) (4)

(5)

(6)

(7) Y(MeCp)₂(3,5-MePn-C₃HN₂) (8)

(9)

(10)

In one embodiment, a mixture of two or more organometallic complexes of Formula I is provided.

In another embodiment, a metal complex of Formula II is provided: [((R⁹)_(n)Cp)₂M²L²]₂ (II), wherein M² is a Group 3 metal or a lanthanide; each R⁹ is independently hydrogen or C₁-C₅-alkyl; n is 1, 2, 3, 4 or 5; Cp is cyclopentadienyl ring; and L² is selected from the group consisting of: Cl; F; Br; I; 3,5-R¹⁰R¹¹—C₃HN₂; R²²N═C—C—NR²³; R²⁴R²⁵N—CH₂—NR²⁶—CH₂—NR²⁷R²⁸, and R²⁹O—CH₂—NR³⁰—CH₂—OR³¹; wherein R¹, R¹¹, R²², R²³, R²⁴, R²⁵, R²⁶, R²⁷, R²⁸, R²⁹, R³⁰, and R³¹ are each independently hydrogen or C₁-C₅-alkyl.

In some embodiments, M² may be selected from the group consisting of scandium, yttrium and lanthanum. In other embodiments, M² may be selected from the group consisting of scandium and yttrium. In particular, M² may be scandium.

In other embodiments, wherein when M² is scandium and L² is Cl, R⁹ is C₁-C₅-alkyl.

In some embodiments, L² is selected from the group consisting of: Cl; F; Br; I; and 3,5-R¹⁰R¹¹—C₃HN₂

R⁹, at each occurrence, can be the same or different. For example, if n is 2, 3, 4, or 5, each R⁹ may all be hydrogen or all be an alkyl (e.g., C₁-C₅-alkyl). Alternatively, if n is 2, 3, 4, or 5, each R¹ may be different. For example if n is 2, a first R⁹ may be hydrogen and a second R⁹ may be an alkyl (e.g., C₁-C₅-alkyl).

R¹⁰, R¹¹, R²², R²³, R²⁴, R²⁵, R²⁶, R²⁷, R²⁸, R²⁹, R³⁰, and R³¹, at each occurrence, can be the same or different. For example, R¹⁰, R¹¹, R²², R²³, R²⁴, R²⁵, R²⁶, R²⁷, R²⁸, R²⁹, R³⁰, and R³¹ may all be hydrogen or all be an alkyl (e.g., C₁-C₅-alkyl).

In one embodiment, up to and including eleven of R¹⁰, R¹¹, R²², R²³, R²⁴, R²⁵, R²⁶, R²⁷, R²⁸, R²⁹, R³⁰, and R³¹ may each be hydrogen. For example, at least one of, at least two of, at least three of, at least four of or at least five of, at least six of, at least seven of, at least eight of, at least nine of, at least ten of, at least eleven of R¹⁰, R¹¹, R²², R²³, R²⁴, R²⁵, R²⁶, R²⁷, R²⁸, R²⁹, R³⁰, and R³¹ may be hydrogen.

In another embodiment, up to and including eleven of R¹⁰, R¹¹, R²², R²³, R²⁴, R²⁵, R²⁶, R²⁷, R²⁸, R²⁹, R³⁰, and R³¹ each independently may be an alkyl. For example, at least one of, at least two of, at least three of, at least four of or at least five of, at least six of, at least seven of, at least eight of, at least nine of, at least ten of, at least eleven of R¹⁰, R¹¹, R²², R²³, R²⁴, R²⁵, R²⁶, R²⁷, R²⁸, R²⁹, R³⁰, and R³¹ may be an alkyl.

The alkyl groups discussed herein can be C₁-C₅-alkyl, C₁-C₇-alkyl, C₁-C₆-alkyl, C₁-C₅-alkyl, C₁-C₄-alkyl, C₁-C₃-alkyl, C₁-C₂-alkyl or C₁-alkyl. In a further embodiment, the alkyl is C₁-C₅-alkyl, C₁-C₄-alkyl, C₁-C₃-alkyl, C₁-C₂-alkyl or C₁-alkyl. The alkyl group may be straight-chained or branch. In particular, the alkyl is straight-chained. In a further embodiment the alkyl is selected from the group consisting of methyl, ethyl, propyl, isopropyl, butyl, isobutyl, sec-butyl, tert-butyl, pentyl, and neopentyl.

In some embodiments, each R⁹ independently may be C₁-C₅-alkyl. In other embodiments, each R⁹ independently may be hydrogen or C₁-C₄-alkyl. In another embodiment, each R⁹ independently may be hydrogen, methyl, ethyl, or propyl. In another embodiment, each R⁹ independently may be hydrogen, methyl, or ethyl. In particular, each R⁹ may be methyl.

In a particular embodiment, M² may be scandium and each R⁹ independently may be a C₁-C₄-alkyl. In another embodiment, M² may be scandium, L² may be Cl and each R⁹ independently may be methyl, ethyl or propyl. In particular, each R⁹ may independently be methyl or ethyl.

In another particular embodiment, M² may be yttrium and each R⁹ independently may be a C₁-C₄-alkyl. In another embodiment, M² may be yttrium, L² may be 3,5-R¹⁰R¹¹—C₃HN₂, each R⁹ independently may be methyl, ethyl or propyl and R¹⁰ and R⁹ each independently may be a C₁-C₅-alkyl. In particular, each R⁹ independently may be methyl or ethyl.

Examples of metal complexes corresponding in structure to Formula II are provided in Table 2.

TABLE 2 Complexes of Formula II [Sc(MeCp)₂]Cl]₂ [Y(MeCp)₂(3,5-MePn-C₃HN₂)]₂ (11) (12)

Additional other metal complexes provided herein include Y(MeCp)₂(3,5-tBu₂—C₃HN₂)(THF), Y(MeCp)₂(3,5-MePn—C₃HN₂)(THF), and Y(MeCp)₂(3,5-tBu, iBu-C₃HN₂)(THF). As used herein, “THF” refers to tetrahydrofuran

The metal complexes provided herein may be prepared, for example, as shown below in Scheme A.

The metal complexes provided herein may be used to prepare metal-containing films such as, for example, elemental scandium, elemental yttrium, scandium oxide, yttrium oxide, scandium nitride, yttrium nitride and scandium silicide and yttrium silicide films. Thus, according to another aspect, a method of forming a metal-containing film by a vapor deposition process is provided. The method comprises vaporizing at least one organometallic complex corresponding in structure to Formula I, Formula II, or a combination thereof, as disclosed herein. For example, this may include (1) vaporizing the at least one complex and (2) delivering the at least one complex to a substrate surface or passing the at least one complex over a substrate (and/or decomposing the at least one complex on the substrate surface).

A variety of substrates can be used in the deposition methods disclosed herein. For example, metal complexes as disclosed herein may be delivered to, passed over, or deposited on a variety of substrates or surfaces thereof such as, but not limited to, silicon, crystalline silicon, Si(100), Si(111), silicon oxide, glass, strained silicon, silicon on insulator (SOI), doped silicon or silicon oxide(s) (e.g., carbon doped silicon oxides), silicon nitride, germanium, gallium arsenide, tantalum, tantalum nitride, aluminum, copper, ruthenium, titanium, titanium nitride, tungsten, tungsten nitride, and any number of other substrates commonly encountered in nanoscale device fabrication processes (e.g., semiconductor fabrication processes). As will be appreciated by those of skill in the art, substrates may be exposed to a pretreatment process to polish, etch, reduce, oxidize, hydroxylate, anneal and/or bake the substrate surface. In one or more embodiments, the substrate surface contains a hydrogen-terminated surface.

In certain embodiments, the metal complex may be dissolved in a suitable solvent such as a hydrocarbon or an amine solvent to facilitate the vapor deposition process. Appropriate hydrocarbon solvents include, but are not limited to, aliphatic hydrocarbons, such as hexane, heptane and nonane; aromatic hydrocarbons, such as toluene and xylene; and aliphatic and cyclic ethers, such as diglyme, triglyme, and tetraglyme. Examples of appropriate amine solvents include, without limitation, octylamine and N,N-dimethyldodecylamine. For example, the metal complex may be dissolved in toluene to yield a solution with a concentration from about 0.05 M to about 1 M.

In another embodiment, the at least one metal complex may be delivered “neat” (undiluted by a carrier gas) to a substrate surface.

In one embodiment, the vapor deposition process is chemical vapor deposition.

In another embodiment, the vapor deposition process is atomic layer deposition.

The ALD and CVD methods encompass various types of ALD and CVD processes such as, but not limited to, continuous or pulsed injection processes, liquid injection processes, photo-assisted processes, plasma-assisted, and plasma-enhanced processes. For purposes of clarity, the methods of the present technology specifically include direct liquid injection processes. For example, in direct liquid injection CVD (“DLI-CVD”), a solid or liquid metal complex may be dissolved in a suitable solvent and the solution formed therefrom injected into a vaporization chamber as a means to vaporize the metal complex. The vaporized metal complex is then transported/delivered to the substrate surface. In general, DLI-CVD may be particularly useful in those instances where a metal complex displays relatively low volatility or is otherwise difficult to vaporize.

In one embodiment, conventional or pulsed CVD is used to form a metal-containing film vaporizing and/or passing the at least one metal complex over a substrate surface. For conventional CVD processes see, for example Smith, Donald (1995). Thin-Film Deposition: Principles and Practice. McGraw-Hill.

In one embodiment, CVD growth conditions for the metal complexes disclosed herein include, but are not limited to:

-   -   a. Substrate temperature: 50-600° C.     -   b. Evaporator temperature (metal precursor temperature): 0-200°         C.     -   c. Reactor pressure: 0-100 Torr     -   d. Argon or nitrogen carrier gas flow rate: 0-500 sccm     -   e. Oxygen flow rate: 0-500 sccm     -   f. Hydrogen flow rate: 0-500 sccm     -   g. Run time: will vary according to desired film thickness

In another embodiment, photo-assisted CVD is used to form a metal-containing film by vaporizing and/or passing at least one metal complex disclosed herein over a substrate surface.

In a further embodiment, conventional (i.e., pulsed injection) ALD is used to form a metal-containing film by vaporizing and/or passing at least one metal complex disclosed herein over a substrate surface. For conventional ALD processes see, for example, George S. M., et al. J. Phys. Chem., 1996, 100, 13121-13131.

In another embodiment, liquid injection ALD is used to form a metal-containing film by vaporizing and/or passing at least one metal complex disclosed herein over a substrate surface, wherein at least one metal complex is delivered to the reaction chamber by direct liquid injection as opposed to vapor draw by a bubbler. For liquid injection ALD processes see, for example, Potter R. J., et al., Chem. Vap. Deposition, 2005, 11(3), 159-169.

Examples of ALD growth conditions for metal complexes disclosed herein include, but are not limited to:

-   -   a. Substrate temperature: 0-400° C.     -   b. Evaporator temperature (metal precursor temperature): 0-200°         C.     -   c. Reactor pressure: 0-100 Torr     -   d. Argon or nitrogen carrier gas flow rate: 0-500 sccm     -   e. Reactive gas flow rate: 0-500 sccm     -   f. Pulse sequence (metal complex/purge/reactive gas/purge): will         vary according to chamber size     -   g. Number of cycles: will vary according to desired film         thickness

In another embodiment, photo-assisted ALD is used to form a metal-containing film by vaporizing and/or passing at least one metal complex disclosed herein over a substrate surface. For photo-assisted ALD processes see, for example, U.S. Pat. No. 4,581,249.

In another embodiment, plasma-assisted or plasma-enhanced ALD is used to form a metal-containing film by vaporizing and/or passing at least one metal complex disclosed herein over a substrate surface.

In another embodiment, a method of forming a metal-containing film on a substrate surface comprises: during an ALD process, exposing a substrate to a vapor phase metal complex according to one or more of the embodiments described herein, such that a layer is formed on the surface comprising the metal complex bound to the surface by the metal center (e.g., nickel); during an ALD process, exposing the substrate having bound metal complex with a co-reactant such that an exchange reaction occurs between the bound metal complex and co-reactant, thereby dissociating the bound metal complex and producing a first layer of elemental metal on the surface of the substrate; and sequentially repeating the ALD process and the treatment.

The reaction time, temperature and pressure are selected to create a metal-surface interaction and achieve a layer on the surface of the substrate. The reaction conditions for the ALD reaction will be selected based on the properties of the metal complex. The deposition can be carried out at atmospheric pressure but is more commonly carried out at a reduced pressure. The vapor pressure of the metal complex should be low enough to be practical in such applications. The substrate temperature should be high enough to keep the bonds between the metal atoms at the surface intact and to prevent thermal decomposition of gaseous reactants. However, the substrate temperature should also be high enough to keep the source materials (i.e., the reactants) in the gaseous phase and to provide sufficient activation energy for the surface reaction. The appropriate temperature depends on various parameters, including the particular metal complex used and the pressure. The properties of a specific metal complex for use in the ALD deposition methods disclosed herein can be evaluated using methods known in the art, allowing selection of appropriate temperature and pressure for the reaction. In general, lower molecular weight and the presence of functional groups that increase the rotational entropy of the ligand sphere result in a melting point that yields liquids at typical delivery temperatures and increased vapor pressure.

A metal complex for use in the deposition methods will have all of the requirements for sufficient vapor pressure, sufficient thermal stability at the selected substrate temperature and sufficient reactivity to produce a reaction on the surface of the substrate without unwanted impurities in the thin film. Sufficient vapor pressure ensures that molecules of the source compound are present at the substrate surface in sufficient concentration to enable a complete self-saturating reaction. Sufficient thermal stability ensures that the source compound will not be subject to the thermal decomposition which produces impurities in the thin film.

Thus, the metal complexes disclosed herein utilized in these methods may be liquid, solid, or gaseous. Typically, the metal complexes are liquids or solids at ambient temperatures with a vapor pressure sufficient to allow for consistent transport of the vapor to the process chamber.

In one embodiment, an elemental metal, a metal nitride, a metal oxide, or a metal silicide film can be formed by delivering for deposition at least one metal complex as disclosed herein, independently or in combination with a co-reactant. In this regard, the co-reactant may be deposited or delivered to or passed over a substrate surface, independently or in combination with the at least one metal complex. As will be readily appreciated, the particular co-reactant used will determine the type of metal-containing film is obtained. Examples of such co-reactants include, but are not limited to hydrogen, hydrogen plasma, oxygen, air, water, an alcohol, H₂O₂, N₂O, ammonia, a hydrazine, a borane, a silane, ozone, or a combination of any two or more thereof. Examples of suitable alcohols include, without limitation, methanol, ethanol, propanol, isopropanol, tert-butanol, and the like. Examples of suitable boranes include, without limitation, hydridic (i.e., reducing) boranes such as borane, diborane, triborane and the like. Examples of suitable silanes include, without limitation, hydridic silanes such as silane, disilane, trisilane, and the like. Examples of suitable hydrazines include, without limitation, hydrazine (N₂H₄), a hydrazine optionally substituted with one or more alkyl groups (i.e., an alkyl-substituted hydrazine) such as methylhydrazine, tert-butylhydrazine, N,N- or N,N′-dimethylhydrazine, a hydrazine optionally substituted with one or more aryl groups (i.e., an aryl-substituted hydrazine) such as phenylhydrazine, and the like.

In one embodiment, the metal complexes disclosed herein are delivered to the substrate surface in pulses alternating with pulses of an oxygen-containing co-reactant as to provide metal oxide films. Examples of such oxygen-containing co-reactants include, without limitation, H₂O, H₂O₂, O₂, ozone, air, i-PrOH, t-BuOH, or N₂O.

In other embodiments, a co-reactant comprises a reducing reagent such as hydrogen. In such embodiments, an elemental metal film is obtained. In particular embodiments, the elemental metal film consists of, or consists essentially of, pure metal. Such a pure metal film may contain more than about 80, 85, 90, 95, or 98% metal. In even more particular embodiments, the elemental metal film is a scandium film or a yttrium film.

In other embodiments, a co-reactant is used to form a metal nitride film by delivering for deposition at least one metal complex as disclosed herein, independently or in combination, with a co-reactant such as, but not limited to, ammonia, a hydrazine, and/or other nitrogen-containing compounds (e.g., an amine) to a reaction chamber. A plurality of such co-reactants may be used. In further embodiments, the metal nitride film is a nickel nitride film.

In another embodiment, a mixed-metal film can be formed by a vapor deposition process which vaporizes at least one metal complex as disclosed herein in combination, but not necessarily at the same time, with a second metal complex comprising a metal other than that of the at least one metal complex disclosed herein.

In a particular embodiment, the methods of the present technology are utilized for applications such as dynamic random access memory (DRAM) and complementary metal oxide semi-conductor (CMOS) for memory and logic applications, on substrates such as silicon chips.

Any of the metal complexes disclosed herein may be used to prepare thin films of the elemental metal, metal oxide, metal nitride, and/or metal silicide. Such films may find application as oxidation catalysts, anode materials (e.g., SOFC or LIB anodes), conducting layers, sensors, diffusion barriers/coatings, super- and non-superconducting materials/coatings, tribological coatings, and/or, protective coatings. It is understood by one of ordinary skill in the art that the film properties (e.g., conductivity) will depend on a number of factors, such as the metal(s) used for deposition, the presence or absence of co-reactants and/or co-complexes, the thickness of the film created, the parameters and substrate employed during growth and subsequent processing.

Fundamental differences exist between the thermally-driven CVD process and the reactivity-driven ALD process. The requirements for precursor properties to achieve optimum performance vary greatly. In CVD a clean thermal decomposition of the complex to deposit the required species onto the substrate is critical. However, in ALD such a thermal decomposition is to be avoided at all costs. In ALD, the reaction between the input reagents must be rapid at the surface resulting in formation of the target material on the substrate. However, in CVD, any such reaction between species is detrimental due to their gas phase mixing before reaching the substrate, which could lead to particle formation. In general it is accepted that good CVD precursors do not necessarily make good ALD precursors due to the relaxed thermal stability requirement for CVD precursors. In this invention, Formula I metal complexes possess enough thermal stability and reactivity toward select co-reactants to function as ALD precursors, and they possess clean decomposition pathways at higher temperatures to form desired materials through CVD processes as well. Therefore, the metal complexes described by Formula I are advantageously useful as viable ALD and CVD precursors.

Reference throughout this specification to “one embodiment,” “certain embodiments,” “one or more embodiments” or “an embodiment” means that a particular feature, structure, material, or characteristic described in connection with the embodiment is included in at least one embodiment of the present technology. Thus, the appearances of the phrases such as “in one or more embodiments,” “in certain embodiments,” “in one embodiment” or “in an embodiment” in various places throughout this specification are not necessarily referring to the same embodiment of the present technology. Furthermore, the particular features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments.

Although the present technology herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present technology. It will be apparent to those skilled in the art that various modifications and variations can be made to the method and apparatus of the present technology without departing from the spirit and scope of the present technology. Thus, it is intended that the present technology include modifications and variations that are within the scope of the appended claims and their equivalents. The present technology, thus generally described, will be understood more readily by reference to the following examples, which is provided by way of illustration and is not intended to be limiting.

The invention can additionally or alternatively include one or more of the following embodiments.

Embodiment 1

A metal complex corresponding in structure to Formula I: [(R¹)_(n)Cp]₂M¹L¹ (I), wherein M¹ is a Group 3 metal or a lanthanide (e.g., scandium, yttrium and lanthanum); each R¹ is independently hydrogen, C₁-C₅-alkyl or silyl; n is 1, 2, 3, 4, or 5; Cp is cyclopentadienyl ring; and L¹ is selected from the group consisting of: NR²R³; N(SiR⁴R⁵R⁶)₂; 3,5-R⁷R⁸—C₃HN₂; 1-(R³²)C₃H₄; 1-R³³-3-R³⁴—C₃H₃; and R³⁵, R³⁶—C₃HO₂; R¹²N═C—C—NR¹³; R¹⁴R¹⁵N—CH₂—CH₂—NR¹⁶—CH₂—CH₂—NR¹⁷R¹⁸; and R¹⁹O—CH₂—CH₂—NR²⁰—CH₂—CH₂—OR²¹; wherein R², R³, R⁴, R⁵, R⁶, R⁷, R⁸, R¹², R¹³, R⁴, R¹⁵, R¹⁶, R¹⁷, R¹⁸, R¹⁹, R²⁰, and R²¹ are each independently hydrogen or C₁-C₅-alkyl; and R³², R³³, R³⁴, R³⁵, and R³⁶ are each independently alkyl or silyl; optionally, wherein when M¹ is yttrium and L¹ is 3,5-R⁷R⁸—C₃HN₂, R¹ is C₁-C₅-alkyl or silyl; and optionally, wherein when M¹ is yttrium and L¹ is N(SiR⁴R⁵R⁶)₂, n is 1, 2, 3, or 4.

Embodiment 2

The metal complex of embodiment 1, wherein each R¹ is independently hydrogen, C₁-C₄-alkyl or silyl; and R², R³, R⁴, R⁵, R⁶, R⁷, and R⁸ are each independently hydrogen or C₁-C₄-alkyl; and R³², R³³, R³⁴, R³⁵, and R³⁶ are each independently C₁-C₅-alkyl or silyl.

Embodiment 3

The metal complex of embodiment 1 or 2, wherein each R¹ is independently hydrogen, methyl, ethyl, propyl or silyl, preferably hydrogen, methyl or ethyl, more preferably methyl; and R², R³, R⁴, R⁵, R⁶, R⁷, and R⁸ are each independently hydrogen, methyl, ethyl or propyl, preferably hydrogen methyl or ethyl, more preferably hydrogen or methyl; and R³², R³³, R³⁴, R³⁵, and R³⁶ are each independently C₁-C₄-alkyl or silyl, preferably methyl, ethyl, propyl or silyl, more preferably SiMe₃.

Embodiment 4

The metal complex of any one of the previous embodiments, wherein each R¹ is independently hydrogen, C₁-C₄-alkyl or silyl; and L¹ is NR²R³, wherein R² and R³ are each independently hydrogen or C₁-C₄-alkyl.

Embodiment 5

The metal complex of embodiment 4, wherein each R¹ is independently hydrogen, methyl, ethyl, propyl or silyl, preferably hydrogen, methyl, or ethyl, more preferably methyl; and R² and R³ are each independently hydrogen, methyl, ethyl or propyl, preferably hydrogen, methyl or ethyl.

Embodiment 6

The metal complex of any one of the previous embodiments, wherein each R¹ is independently hydrogen, C₁-C₄-alkyl or silyl; and L¹ is N(SiR⁴R⁵R⁶)₂, wherein R⁴, R⁵, and R⁶ are each independently hydrogen or C₁-C₄-alkyl.

Embodiment 7

The metal complex of embodiment 6, wherein each R¹ is independently hydrogen, methyl, ethyl, propyl or silyl, preferably hydrogen, methyl, or ethyl, more preferably methyl; and R⁴, R⁵, and R⁶ are each independently hydrogen, methyl, ethyl or propyl, preferably hydrogen, methyl or ethyl.

Embodiment 8

The metal complex of any one of the previous embodiments, wherein each R¹ is independently hydrogen, C₁-C₄-alkyl or silyl; and L¹ is 3,5-R⁷R⁸—C₃HN₂, wherein R⁷ and R⁸ are each independently hydrogen or C₁-C₅-alkyl.

Embodiment 9

The metal complex of embodiment 8, wherein each R¹ is independently hydrogen, methyl, ethyl, propyl or silyl, preferably hydrogen, methyl, or ethyl, more preferably methyl.

Embodiment 10

The metal complex of any one of the previous embodiments, wherein each R¹ is independently hydrogen, C₁-C₄-alkyl or silyl, preferably hydrogen, methyl, ethyl or silyl; and L¹ is 1-(R³²)C₃H₄, wherein R³² is C₁-C₅-alkyl or silyl, preferably R³² is methyl, ethyl or silyl, more preferably L¹ is 1-(SiMe₃)C₃H₄.

Embodiment 11

The metal complex of any one of the previous embodiments, wherein each R¹ is independently hydrogen, C₁-C₄-alkyl or silyl, preferably hydrogen, methyl, ethyl or silyl; and L¹ is 1-R³³-3-R³⁴—C₃H₃, wherein R³³ and R³⁴ are each independently C₁-C₅-alkyl or silyl, preferably R³³ and R³⁴ are each independently methyl, ethyl or silyl, more preferably L¹ is 1,3-bis-(SiMe₃)₂C₃H₃.

Embodiment 12

The metal complex of any one of the previous embodiments, wherein each R¹ is independently hydrogen, C₁-C₄-alkyl or silyl, preferably hydrogen, methyl, ethyl or silyl; and L¹ is R³⁵, R³⁶—C₃HO₂, wherein R³⁵ and R³⁶ are each independently C₁-C₅-alkyl or silyl, preferably R³⁵ and R³⁶ are each independently methyl, ethyl, propyl, butyl, or silyl, more preferably L¹ is 6-methyl-2,4-heptanedionate, i.e., Me, iBu-C₃HO₂.

Embodiment 13

The metal complex of any one of the previous embodiments, wherein the complex is: Sc(MeCp)₂[1-(SiMe₃)C₃H₄]; Sc(MeCp)₂[1,3-bis-(SiMe₃)₂C₃H₃]; Sc(MeCp)₂[N(SiMe₃)₂]; Sc(MeCp)₂(3,5-Me₂—C₃HN₂); Sc(MeCp)₂(Me, iBu-C₃HO₂), preferably Sc(MeCp)₂[1-(SiMe₃)C₃H₄]; Sc(MeCp)₂[1,3-bis-(SiMe₃)₂C₃H₃]; Sc(MeCp)₂[N(SiMe₃)₂]; and Sc(MeCp)₂(3,5-Me₂—C₃HN₂).

Embodiment 14

A metal complex corresponding in structure to Formula II: [((R⁹)_(n)Cp)₂M²L²]₂(II), wherein M² is a Group 3 metal or a lanthanide (e.g., scandium, yttrium and lanthanum); each R⁹ is independently hydrogen or C₁-C₅-alkyl; n is 1, 2, 3, 4 or 5; Cp is cyclopentadienyl ring; and L² is selected from the group consisting of: Cl; F; Br; I; 3,5-R¹⁰R¹¹—C₃HN₂; R²²N═C—C—NR²³; R²⁴R²⁵N—CH₂—NR²⁶—CH₂—NR²⁷R²⁸, and R²⁹O—CH₂—NR³⁰—CH₂—OR³¹; wherein R¹⁰, R¹¹, R²², R²³, R²⁴, R²⁵, R²⁶, R²⁷, R²⁸, R²⁹, R³⁰, and R³¹ are each independently hydrogen or C₁-C₅-alkyl, optionally wherein when M² is scandium and L² is Cl, R⁹ is C₁-C₅-alkyl.

Embodiment 15

The metal complex of embodiment 14, wherein each R⁹ is independently C₁-C₅-alkyl

Embodiment 16

The metal complex of embodiment 14 or 15, wherein each R⁹ is independently hydrogen or C₁-C₄-alkyl, preferably hydrogen, methyl, ethyl or propyl, preferably hydrogen, methyl, or ethyl, more preferably methyl.

Embodiment 17

The metal complex of embodiments 14, 15 or 16, wherein M² is scandium; each R⁹ is independently a C₁-C₄-alkyl, preferably methyl, ethyl or propyl, more preferably methyl; and preferably L² is Cl.

Embodiment 18

The metal complex of embodiments 14, 15 or 16, wherein M² is yttrium; each R⁹ is independently a C₁-C₅-alkyl, preferably methyl, ethyl or propyl; more preferably methyl or ethyl; and preferably L² is 3,5-R¹⁰R¹¹—C₃HN₂ and each R⁹ is independently.

Embodiment 19

The metal complex of embodiments 14, 15, 16, 17 or 18, wherein the complex is [Sc(MeCp)₂]Cl]₂; and [Y(MeCp)₂(3,5-MePn—C₃HN₂)]₂.

Embodiment 20

A method of forming a metal-containing film by a vapor deposition process, the method comprising vaporizing at least one metal complex according to any one of the previous embodiments.

Embodiment 21

The method of embodiment 20, wherein the vapor deposition process is chemical vapor deposition, preferably pulsed chemical vapor deposition, continuous flow chemical vapor deposition, and/or liquid injection chemical vapor deposition.

Embodiment 22

The method of embodiment 20, wherein the vapor deposition process is atomic layer deposition, preferably liquid injection atomic layer deposition or plasma-enhanced atomic layer deposition.

Embodiment 23

The method of any one of embodiments 20, 21 or 22, wherein the metal complex is delivered to a substrate in pulses alternating with pulses of an oxygen source, preferably the oxygen source is selected from the group consisting of H₂O, H₂O₂, O₂, ozone, air, i-PrOH, t-BuOH, and N₂O.

Embodiment 24

The method of any one of embodiments 20, 21, 22, or 23 further comprising vaporizing at least one co-reactant selected from the group consisting of hydrogen, hydrogen plasma, oxygen, air, water, ammonia, a hydrazine, a borane, a silane, ozone, and a combination of any two or more thereof, preferably the at least one co-reactant is a hydrazine (e.g., hydrazine (N₂H₄), N,N-dimethylhydrazine).

Embodiment 25

The method of any one of embodiments 20, 21, 22, 23 or 24, wherein the method is used for a DRAM or CMOS application.

EXAMPLES

Unless otherwise noted, all synthetic manipulations are performed under an inert atmosphere (e.g., purified nitrogen or argon) using techniques for handling air-sensitive materials commonly known in the art (e.g., Schlenk techniques).

Example 1: Preparation of Complex 11 ([Sc(MeCp)₂Cl]₂)

A 500 mL Schlenk flask equipped with a magnetic stirrer was charged with ScCl₃ (15.5 g, 0.102 mol) and KMeCp (24.2 g, 0.205 mol) followed by anhydrous diethyl ether (200 mL). The mixture was stirred at room temperature (˜18° C. to ˜24° C.) for 12 hours under a nitrogen atmosphere, giving a maroon colored suspension. The solvent was removed under pressure and the resulting solid was extracted with 5×50 mL toluene, and filtered through a medium frit. The filtrate was removed from the solvent under reduced pressure to afford the final product as a yellow powder (16.4 g, 0.0344 mol, 67% yield). ¹H NMR (C₆D₆) of product: δ 2.02 (12H, MeC₅H₄), 6.09 (8H, MeC₅H₄), 6.24 (8H, MeC₅H₄). ¹³C NMR (C₆D₆) of product: δ 15.4 (MeC₅H₄), 114.4 (MeC₅H₄), 116.0 (MeC₅H₄), 124.9 (MeC₅H₄).

Example 2: Preparation of Complex 3 (Sc(MeCp)₂[N(SiMe₃)₂])

A 250 mL Schlenk flask equipped with magnetic stirrer was charged with [Sc(MeCp)₂Cl]₂ (4.6 g, 0.0098 mol) and KN(SiMe₃)₂(3.9 g, 0.020 mol) followed by anhydrous diethyl ether (100 mL). The mixture was stirred at room temperature (˜18° C. to ˜24° C.) for 12 hours under a nitrogen atmosphere, giving a peach-colored suspension. The solvent was removed under pressure and the resulting solid was extracted with 3×30 mL hexane, and filtered through a medium frit. The filtrate was removed from the solvent under reduced pressure to afford the final product as a yellow powder. (6.7 g, 0.018 mol, 90% yield. ¹H NMR (C₆D₆) of product: δ 1.10 (18H, SiMe₃), 2.04 (6H, MeC₅H₄), 5.85 (4H, MeC₅H₄), 6.00 (4H, MeC₅H₄). ¹³C NMR (C₆D₆) of product: δ 4.2 (SiMe₃), 15.7 (MeC₅H₄), 114.3 (MeC₅H₄), 115.9 (MeC₅H₄), 125.0 (MeC₅H₄).

Example 3: Synthesis of Complex 2 (Sc(MeCp)₂[1,3-bis(trimethylsilyl)allyl])

A 250 mL Schlenk flask equipped with a magnetic stirrer was charged with [Sc(MeCp)₂Cl]₂ (1.0 g, 2.1 mmol) and K(1,3-bis-trimethylsilyl-allyl) (1.05 g, 4.7 mmol) followed by addition of anhydrous diethyl ether (100 mL). The mixture was stirred at room temperature (˜18° C. to ˜24° C.) for 12 hours under a nitrogen atmosphere, giving an orange suspension. The solvent was removed under reduced pressure and the resulting solid was extracted with 3×30 mL hexane, and filtered through a medium frit. The filtrate was removed of solvent under reduced pressure to afford the final product as a red liquid. (1.0 g, 2.6 mmol, 62% yield). ¹H NMR (C₆D₆) of product: δ 0.04 (18H, SiMe₃), 1.84 (3H, MeC5H4), 1.94 (3H, MeC₅H₄), 4.90 (2H, allyl CH(TMS)), 5.97 (2H, MeC₅H₄), 6.04 (4H, MeC₅H₄), 6.29 (2H, MeC₅H₄), 7.67 (1H, allyl CH).

Example 4: Synthesis of Complex 1 (Sc(MeCp)₂(1-trimethylsilylallyl))

A 250 mL Schlenk flask equipped with a magnetic stirrer was charged with [Sc(MeCp)₂Cl]₂ (5.2 g, 10.9 mmol) and K(trimethylsilyl-allyl) (3.3 g, 21.8 mmol) followed by addition of anhydrous diethyl ether (100 mL). The mixture was stirred at room temperature (˜18° C. to ˜24° C.) for 12 hours under a nitrogen atmosphere, giving an orange suspension. The solvent was removed under reduced pressure and the resulting solid was extracted with 3×30 mL pentane, and filtered through a medium frit. The filtrate was removed of solvent under reduced pressure to afford the final product as a red liquid. (3.7 g, 11.7 mmol, 54% yield). ¹H NMR (C₆D₆) of product: δ −0.02 (9H, SiMe₃), 1.82 (6H, MeC₅H₄), 2.29 (1H, allyl CH₂), 4.15 (1H, allyl CH₂), 4.73 (1H, allyl CH(TMS)), 5.94 (8H, MeC₅H₄), 7.47 (1H, allyl CH).

Example 5: Synthesis of Complex 4 (Sc(MeCp)₂(3,5-dimethyl-pyrazolate))

A 500 mL Schlenk flask equipped with a magnetic stirrer was charged with [Sc(MeCp)₂Cl]₂ (12.0 g, 25.1 mmol) and KMe₂Pz (6.75 g, 50.3 mmol) followed by addition of anhydrous THF (150 mL). The mixture was stirred at room temperature (˜18° C. to ˜24° C.) for 12 hours under a nitrogen atmosphere. The solvent was removed under reduced pressure and the resulting yellow sticky solid was extracted with 5×20 mL toluene, and filtered through a medium frit. The filtrate was removed of solvent under reduced pressure to provide a red oil. Further distillation under vacuum afforded the final product as a light yellow liquid (10.7 g, 35.9 mmol, 72% yield). ¹H NMR (C₆D₆) of product: δ 1.85 (6H, MeC₅H₄), 2.28 (6H, Me₂Pz), 5.84 (4H, MeC₅H₄), 5.96 (1H, Me₂Pz), 6.20 (4H, MeC₅H₄).

Example 6: Synthesis of Complex 8 (Y(MeCp)₂(3-methyl-5-pentyl-pyrazolate))

A 500 mL Schlenk flask equipped with a magnetic stirrer was charged with [Y(MeCp)₂Cl]₂ (9.33 g, 16.5 mmol) and K(Me,Pn)Pz (6.28 g, 33.0 mmol) followed by addition of anhydrous THF (150 mL). The mixture was stirred at room temperature for 12 hours (˜18° C. to ˜24° C.) under a nitrogen atmosphere. The solvent was removed under reduced pressure and the resulting yellow sticky solid was extracted with 5×20 mL toluene, and filtered through a medium frit. The filtrated was removed of solvent under reduced pressure to provide a red oil. Further distillation under vacuum afforded the final product as a light yellow liquid (7.7 g, 19.3 mmol, 58% yield). ¹H NMR (C₆D₆) of product: δ 0.94 (3H, Pentyl), 1.40 (4H, Pentyl), 1.75 (2H, Pentyl), 2.16 (6H, MeC₅H₄), 2.17 (3H, ^(Me,Pn)Pz), 2.65 (2H, Pentyl), 5.66 (4H, MeC₅H₄), 5.90 (1H, ^(Me,Pn)Pz), 5.96 (4H, MeC₅H₄).

Example 7: Synthesis of Complex 9 (Sc(MeCp)₂(6-methyl-2,4-heptanedionate))

A 500 mL Schlenk flask equipped with a magnetic stirrer was charged with [Sc(MeCp)₂Cl]₂ (1.0 g, 1.8 mmol) and K(6-Methyl-2,4-heptanedionate) (0.67 g, 3.7 mmol) followed by addition of anhydrous THF (150 mL). The mixture was stirred at room temperature for 12 hours (˜18° C. to ˜24° C.) under a nitrogen atmosphere. The solvent was removed under reduced pressure and the resulting yellow sticky solid was extracted with 3×20 mL toluene, and filtered through a medium frit. The filtrated was removed of solvent under reduced pressure to provide an orange oil (0.8 g, 2.1 mmol, 58% yield). ¹H NMR (C₆D₆) of product: δ 0.89 (6H, ^(i)Bu), 1.71 (3H, Me), 1.89 (2H, ^(i)Bu), 2.03 (6H, MeC₅H₄), 2.04 (1H, ^(i)Bu), 5.24 (1H, diketonate), 5.85 (4H, MeC₅H₄), 6.05 (2H, MeC₅H₄), 6.14 (2H, MeC₅H₄).

Example 8: Synthesis of Complex 10 (Y(MeCp)₂(6-Methyl-2,4-heptanedionate))

A 500 mL Schlenk flask equipped with a magnetic stirrer was charged with [Y(MeCp)₂Cl]₂ (1.5 g, 2.4 mmol) and K(6-Methyl-2,4-heptanedionate) (0.89 g, 4.9 mmol) followed by addition of anhydrous THF (150 mL). The mixture was stirred at room temperature for 12 hours (˜18° C. to ˜24° C.) under a nitrogen atmosphere. The solvent was removed under reduced pressure and the resulting yellow sticky solid was extracted with 3×20 mL toluene, and filtered through a medium frit. The filtrated was removed of solvent under reduced pressure to provide an orange oil (1.2 g, 2.9 mmol, 60% yield). ¹H NMR (C₆D₆) of product: δ 0.89 (6H, ^(i)Bu), 1.72 (3H, Me), 1.91 (2H, ^(i)Bu), 2.04 (1H, ^(i)Bu), 2.10 (6H, MeC₅H₄), 5.25 (1H, diketonate), 5.95 (4H, MeC₅H₄), 6.10 (2H, MeC₅H₄), 6.15 (2H, MeC₅H₄).

Example 9: ALD of Sc₂O₃ Film Using Complex 4 (Sc(MeCp)₂(3,5-dimethyl-pyrazolate)) and Water

Sc(MeCp)₂(3,5-dimethyl-pyrazolate) was heated to 100-115° C. in a stainless steel bubbler and delivered into an ALD reactor using about 20 sccm of nitrogen as the carrier gas, and pulsed for about 2 seconds followed by a ˜28-58 second purge. A pulse of water vapor (I second) was then delivered from a room temperature cylinder of water followed by a 60-second nitrogen purge. A needle valve was present between the deposition chamber and the water cylinder, and was adjusted so as to have an adequate water vapor dose. The scandium oxide was deposited at about 175-300° C. for up to 300 cycles onto silicon chips having a thin layer of native oxide, SiO₂. The film was cooled down in the reactor to about 60° C. under vacuum with nitrogen purge before unloading. Film thicknesses in the range of 60-260 Å were obtained, and preliminary results show a growth rate of ˜1 Angstrom/cycle. XPS (X-ray Photoelectron Spectroscopy) analysis confirmed the existence of scandium oxide with N and C contaminants on the top surface, which were removed during the XPS analysis. The XPS data in FIGS. 1-14 shows the films have no more than 1% of any element except the desired scandium and oxygen once the surface contamination has been removed by sputtering. In the bulk, only Sc and O were detected, and the stoichiometry measured matched the theoretical composition of Sc₂O₃.

Example 10: ALD of Y₂O₃ Film Using Complex 12 ([Y(MeCp)₂(3,5-MePn—C₃HN₂)]₂)

General Methods

[Y(MeCp)₂(3,5-MePn—C₃HN₂)]₂ was heated to 130-180° C. in a stainless steel bubbler, delivered into a cross-flow ALD reactor using nitrogen as a carrier gas and deposited by ALD using water. H₂O was delivered by vapor draw from a stainless steel ampule at room temperature. Silicon chips having a native SiO₂ layer in the range of 14-17 Å thick were used as substrates. As-deposited films were used for thickness and optical property measurements using an optical ellipsometer. Selected samples were analyzed by XPS for film composition and impurity concentrations.

Example 10a

[Y(MeCp)₂(3,5-MePn—C₃HN₂)]₂ was heated to 170° C., delivered into an ALD reactor using 20 sccm of nitrogen as the carrier gas, and pulsed for 7 seconds from a bubbler followed by a 20 second of N₂ purge, followed by a 0.015 second pulse of H₂O and 90 second of N₂ purge in each ALD cycle, and deposited at multiple temperatures from 125 to 250° C. for 200 or more cycles. As-deposited films were cooled down in the reactor to ˜80° C. under nitrogen purge before unloading. Film thickness in the range of 150 to 420 Å was deposited. Growth rate per cycle data at a fixed reactor inlet position were plotted in FIG. 15.

The curve in FIG. 15 indicates that the growth rate of Y₂O₃ from an un-optimized H₂O ALD process appeared to be temperature dependent under the same deposition conditions. The higher the temperature, the higher the growth rate. Further tests revealed that the growth rate at higher temperatures appeared to be affected by the H₂O purge time, which may be due to initial formation of Y(OH)₃ and/or strong absorption of H₂O by the Y₂O₃ film at higher temperatures. For example, no saturation was reached even after 120 seconds of H₂O purge at 200° C., while its dependence on the H₂O purge time is much smaller at ˜150° C. or lower as shown in FIG. 16.

Example 10b

[Y(MeCp)₂(3,5-MePn—C₃HN₂)]₂ was heated to 170-176° C., delivered into an ALD reactor using 20 sccm of nitrogen as the carrier gas, and pulsed from 3 to 13 seconds from a bubbler to generate various precursor doses, followed by a 60 second of N₂ purge, then by a 0.015 second pulse of H₂O and 30 second of N₂ purge in each ALD cycle, and deposited at 135° C. for 350 cycles. The film thickness was monitored at 3 different positions in the cross-flow reactor along the precursor/carrier gas flow direction, the precursor inlet, the reactor center, and precursor outlet. Growth rate per cycle data are plotted in FIG. 17.

The saturation of the growth rate per cycle (GPC) at ˜0.79 Å/cycle with the precursor dose as well as the convergence of the growth rates at the three different positions suggest that the process at 135° C. is truly an ALD process with insignificant contribution of any CVD component to the growth rate. Under optimized saturated growth conditions, an excellent thickness uniformity of ≤±1.3% over a 6˜7″ diameter area of the cross-flow reactor has been achieved.

The full ALD window with deposition temperature has not yet been determined. This precursor was thermally stable at higher temperatures ≥250° C.

All publications, patent applications, issued patents and other documents referred to in this specification are herein incorporated by reference as if each individual publication, patent application, issued patent, or other document was specifically and individually indicated to be incorporated by reference in its entirety. Definitions that are contained in text incorporated by reference are excluded to the extent that they contradict definitions in this disclosure.

The words “comprise”, “comprises”, and “comprising” are to be interpreted inclusively rather than exclusively. 

What is claimed is:
 1. A metal complex corresponding in structure to Formula I: [(R¹)_(n)Cp]₂M¹L¹  (I) wherein M¹ is scandium; each R¹ is independently C₁-C₅-alkyl or silyl; n is 1, 2, 3, 4, or 5; Cp is cyclopentadienyl ring; and L¹ is selected from the group consisting of: N(SiR⁴R⁵R⁶)₂; 3,5-R⁷R⁸—C₃HN₂; 1-(R³²)C₃H₄; 1-R³³-3-R³⁴—C₃H₃; and R³⁵, R³⁶—C₃HO₂; wherein R⁴, R⁵, R⁶, R⁷, and R⁸ are each independently C₁-C₅-alkyl; R³³, R³⁴, R³⁵, and R³⁶ are each independently alkyl or silyl; and R³² is silyl.
 2. The metal complex of claim 1, wherein each R¹ is independently methyl, ethyl, propyl or silyl; R⁴, R⁵, R⁶, R⁷ and R⁸ are each independently methyl, ethyl or propyl; and R³³, R³⁴, R³⁵, and R³⁶ are each independently C₁-C₄-alkyl or silyl.
 3. The metal complex of claim 1, wherein each R¹ is independently methyl or ethyl; R⁴, R⁵, R⁶, R⁷, and R⁸ are each independently methyl, or ethyl; and R³³, R³⁴, R³⁵, and R³⁶ are each independently methyl, ethyl, propyl or silyl.
 4. The metal complex of claim 1, wherein each R¹ is methyl; R⁴, R₅, R₆, R⁷, and R⁸ are each independently methyl; and R³², R³³, R³⁴, R³⁵, and R³⁶ are each SiMe₃.
 5. The metal complex of claim 1, wherein each R¹ is independently hydrogen, C₁-C₄-alkyl or silyl; and L¹ is 1-(SiMe₃)C₃H₄ or L¹ is 1,3-bis-(SiMe₃)₂C₃H₃.
 6. The metal complex of claim 1, wherein the complex is: Sc(MeCp)₂[1-(SiMe₃)C₃H₄]; Sc(MeCp)₂[1,3-bis-(SiMe₃)₂C₃H₃]; Sc(MeCp)₂[N(SiMe₃)₂]; or Sc(MeCp)₂(3,5-Me₂—C₃HN₂).
 7. A metal complex corresponding in structure to Formula II: [((R⁹)_(n)Cp)₂M²L²]₂  (II) wherein M² is scandium; each R⁹ is independently C₁-C₅-alkyl; n is 1, 2, 3, 4 or 5; Cp is cyclopentadienyl ring; and L² is selected from the group consisting of: Cl, F, Br, I, and 3,5-R¹⁰R¹¹—C₃HN₂; wherein R¹⁰ and R¹¹ are each independently hydrogen or C₁-C₅-alkyl; wherein when L² is Cl, then R⁹ is C₁-C₅-alkyl.
 8. The metal complex of claim 7, wherein each R⁹ is independently C₁-C₄-alkyl.
 9. The metal complex of claim 7, wherein L² is Cl and each R⁹ is independently methyl, ethyl or propyl.
 10. The metal complex of claim 7, wherein the complex is: [Sc(MeCp)₂]Cl]₂.
 11. A method of forming a metal-containing film by a vapor deposition process, the method comprising vaporizing at least one metal complex corresponding in structure to Formula I: (R¹Cp)₂M¹L¹  (I) wherein M¹ is scandium; each R¹ is independently C₁-C₅-alkyl or silyl; Cp is cyclopentadienyl ring; and L¹ is selected from the group consisting of: N(SiR⁴R⁵R⁶)₂; 3,5-R⁷R⁸—C₃HN₂; 1-(R³²)C₃H₄; 1-R³³-3-R³⁴—C₃H₃; and R³⁵, R³⁶—C₃HO₂; wherein R⁴, R⁵, R⁶, R⁷, and R⁸ are each independently C₁-C₅-alkyl; R³³, R³⁴, R³⁵, and R³⁶ are each independently alkyl or silyl; and R³² is silyl.
 12. The method of claim 11, wherein each R¹ is independently methyl, ethyl, propyl, or silyl; R⁴, R⁵, R⁶, R⁷, and R⁸ are each independently methyl, ethyl or propyl; and R³³, R³⁴, R³⁵, and R³⁶ are each independently C₁-C₄-alkyl or silyl.
 13. The method of claim 11, wherein each R¹ is independently methyl, or ethyl; and R⁴, R⁵, R⁶, R⁷, R⁸ are each independently methyl, or ethyl; and R³³, R³⁴, R³⁵, and R³⁶ are each independently methyl, ethyl, propyl or silyl.
 14. The method of claim 11, wherein each R¹ is methyl; R⁴, R⁵, R⁶, R⁷, and R⁸ are each independently methyl; and R³², R³³, R³⁴, R³⁵, and R³⁶ are each SiMe₃.
 15. The method of claim 11, wherein each R¹ is independently C₁-C₄-alkyl or silyl; and L¹ is 1-(SiMe₃)C₃H₄ or L¹ is 1,3-bis-(SiMe₃)₂C₃H₃.
 16. The method of claim 11, wherein the complex is: Sc(MeCp)₂[1-(SiMe₃)C₃H₄]; Sc(MeCp)₂[1,3-bis-(SiMe₃)₂C₃H₃]; Sc(MeCp)₂[N(SiMe₃)₂]; and/or Sc(MeCp)₂(3,5-Me₂—C₃HN₂).
 17. The method of claim 11, wherein the vapor deposition process is chemical vapor deposition or atomic layer deposition, wherein the chemical vapor deposition is pulsed chemical vapor deposition, continuous flow chemical vapor deposition, or liquid injection chemical vapor deposition, and wherein the atomic layer deposition is liquid injection atomic layer deposition or plasma-enhanced atomic layer deposition.
 18. The method of claim 11, wherein the metal complex is delivered to a substrate in pulses alternating with pulses of an oxygen source, wherein the oxygen source is selected from the group consisting of H₂O, H₂O₂, O₂, ozone, air, i-PrOH, t-BuOH, and N₂O.
 19. The method of claim 11, further comprising vaporizing at least one co-reactant selected from the group consisting of hydrogen, hydrogen plasma, oxygen, air, water, ammonia, a hydrazine, a borane, a silane, ozone, and a combination of any two or more thereof, wherein the hydrazine is hydrazine (N₂H₄) or N,N-dimethylhydrazine. 